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Application: |
Use in Wafer Bumping, MEMS, etc. industries |
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Specification : |
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Auto-Robot Transfer (Single-Arm/Dual-Arm) |
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Multi- Step Recipe setting |
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Two Recipes setting mode (Slot mode & Single wafer mode) |
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Recipes memory function. |
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Available communication protocols are SMEMA, SECS/GEM. |
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Mudbugs and Ethernet (Remote Control) |
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Function |
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Spin Coater Module : |
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Server-Driver Chuck with Programming rpm 0~8,000 rpm |
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Server-Driver dispense arm with programmable sweep |
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PR Flow¡GMax. 50 c.c. / 1 time, <4,000 cp. |
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Uniformity¡G < ± 5% |
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Back Side Clean |
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EBR Function, ± 0.2 mm, |
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Baking Unit |
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Temperature¡G30~250 ¢J |
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Hot Plate Temperature Uniformity¡G |
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< 100 °C, <± 1 °Ç, >100 °C <± 1% |
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Application : |
2”~ 12” Wafe |
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Specification : |
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With SUS-316L-EP Rotor |
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With SUS-316L-EP Bowl |
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With Viton door seal & real seal |
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Use Air seal for motor and Bowl |
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With Brushless Motor |
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With non-contact N2 heater |
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With 0.22 um / 0.003um filter |
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All PTFE DI and N2 Valve |
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All PFA Tube for DI and N2 |
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With 5” LCD Touch Panel |
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Function : |
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Basic Function: DIW Rinse, Pipe Purge, Spin Dry, Hot N2 |
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Max. Speed of spin: Up to 2,800 rpm. (200 mm/ 2,400 rpm, 300 |
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mm/1,000 rpm.) |
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With N2 continuous purge |
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N2 flow can be heated up to 70 °C |
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With DIW Resistance meter |
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With Anti- Static Device |
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With N2 Low flow interlock |
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With EMO function |
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Recipe Capacity: Up to 15 recipes by CT-303/CT-308 Controller |
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Max. Steps per recipe: Up to 10 steps |
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With Auto-Clean Function |
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The vibration is less than 200 um while rotor spinning. (200 |
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mm/ 300mm, 300 um .) |
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Spin speed tolerance: Less than 10% |
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Feature / Advantage |
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High quality –exceeds stringent industry standards |
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High Cleanliness – special sealing & positive – pressure |
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design to isolate moving rotational parts away from the chamber |
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to create low particle performance |
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Patented design – Brushless motor design & patented motor |
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control module, to provide stable rotation speed |
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High precision – precision balance & calibration to limit initial |
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vibration; run-time auto-adjustment & error-correction design to |
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constantly detect and correct rotation speed |
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Dimension : |
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A. CT-603 – |
1000*100*1200mm |
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B. CT-608 – |
Double chamber : 500*705*1820mm |
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Single chamber : 500*630*1595mm |
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C. CT-605 – |
Double chamber : 500*705*1820mm |
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Single chamber : 500*630*1595mm |
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D. CT-805 – |
Double chamber : 550*790*1960mm |
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Single chamber : 550*678*1585mm |
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E. CT-901 – |
1055*1055*925mm |
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F. CT-1206– |
Single chamber : 720*800*1700mm |
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Application : CMP Process |
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Function : Close-Loop Slurry Flow Control |
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Specification : |
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Application : CMP Process, Clean/Etch, etc. Wet Process |
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Function : Close-Loop Slurry Flow Control |
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Specification : CMP Process |
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Etch (Acid Tool, Solvent Tool) |
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Metal Etch (Al, Pt, Ti, TiW, AU, Cu..) |
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Oxide Etch |
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Si Etch |
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Cleaning (Acid Tool, Solvent Tool) |
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Polymer Removal |
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Pre Diffusion Clean |
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DHF, SC1, SC2 |
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Wafer Reclaim |
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Post CMP Clean |
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Resist Strip (Solvents, Ozone) |
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Positive Resist |
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Negative Resist |
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| What’s the process to be validated ? |
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BHF : SiO2 etching |
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HCL : Cleaning |
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H2SO4+H2O2 : Organic cleaning |
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ITO-etching : ITO film etching |
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KI-etching : Au electrode |
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Cr-etching : Cr film |
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PR stripping : NMP etching |
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| Rotor (Stainless Steel) |
| Design, Manufacturing and Balancing |
| Type¡G2”, 4”, 6”, 8” |
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| Window |
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6” Window(270) C/T No. 121-00024-C |
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8” Window(280) C/T No. 121-00025-A |
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12” Window(340) C/T No. 121-00026-A |
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OEM Parts No. as below |
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No.10892-511 Window 240 LH |
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No.10892-512 Window 240 RH |
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No.123R0013-545 Window 260 LH/RH |
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No.123R0013-501 Window 260 LH |
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No.123R0013-502 Window 260 RH |
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No.123R0013-546 Window 270 LH/RH |
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No.123R0013-503 Window 270 LH & VAD |
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No.123R0013-504 Window 270 RH |
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No.123R0004-01 Window 280 LH/RH 6 Screws |
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No.123R0005-01 Window 2300 LH/RH 8 Screws, |
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| Door Seal |
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White Viton - Seal Inflate Door |
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Used in SRD 260S, 260F, 460S, |
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460F,860S, 860F, 270S, 270F, |
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470S, 470F, 870S, 870F, 280S, |
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280F, 480S, 480F,880S, 880F, |
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2300S, 2300F, 4300S, 4300F, |
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8300S, 8300F |
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| Rear Bowl Seal |
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Viton – S Type |
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Used in SRD |
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| N2 Filter (0.003um) |
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Used in SRD/ SAT/ SST |
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| Pressure Switch |
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Used in SRD |
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| Rotor Stop Pos/RSP |
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Used in SRD |
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