Advantages of Electrostatic Chuck

  • vacuum conditions
  • No particle
    generation
  • High flatness
  • Homogeneous clamping force
  • Temperature control
  • Porous materials

Since the first ESC was released in 2011, our engineering team has built an extensive manufacturing technologies to enable Calitech to fabricate ECS in house. We work with customers closely to develop optimal ESC solutions for various applications. Our advanced technologies provide clamping capability of a wide variety of materials that are not only semi-conductive but also insulators.











Manufacturing process

Manufacturing Processes

Whole manufacturing processes have been built for shortest lead time and best quality control.

STEP 1

CNC Machining

STEP 2

Vacuum Brazing

STEP 3

Chemical Cleaning

STEP 4

Anodization

STEP 5

Blast texturing

STEP 6

Plasma Spray

STEP 7

Surface Grinding and Lapping

STEP 8

Function Testing

STEP 9

Cleaning Room Assembly