Calitech is able to offer critical components surrounding the wafer inside process chambers, and also provide refurbishing services for those parts, such as Retaining Ring, Clamp Ring, Shower Head, Chamber Lid and etc.
The critical components can be applied to Etching, CVD, PVD and CMP process equipments for the semiconductor, advanced packaging, III/V, MEMS, LED and FPD.
Calitech have extensive experience of processing aluminum, stainless steel, brass, specialty metals, engineering plastics, titanium, silicon, ceramic, quartz, elastomers, composite materials and etc.
Calitech has concentrated on components development to semiconductor manufacturing technology, we have precision components manufacturing technologies in vacuum processes (Etch, CVD/PVD). In addition to the basic material selection and precision machining, we also provide special electrochemical surface treatments, bead blasting, plasma thermal spray, vacuum brazing, precision cleaning, failure analysis, inspection and more. Using special semiconductor specifications to meet the specific needs of the customer. All special processes are required to improve and monitor quality for customer satisfaction.
We have provided the machining solution from prototype development to volume production. Critical, complex machined components are our area of expertise. The combination of the latest machining technology and programming software, offering high speed metal removal techniques, in- house mold fixture development and strict process control. Our goal is to give high quality, repeatable, cost competitive machining services to our customers.
Our electrochemical surface treatments include anodizing, nickel plating, electrolytic polishing, sand blasting and precision cleaning processes. All parts are operator inspected multiple times before they get to our Quality Assurance department to guarantee our customers get the part they expect.
Vacuum brazing has long since been used as a technique for joining metals, it is an indispensable technique in manufacturing industry. Nowadays, brazing materials are diversifying and products are becoming more and more complex, our vacuum brazing furnace is used to manufacture products that require various types of brazing, such as aluminum alloys brazing and heat treatment.
Plasma spray ceramic coatings are widely used in a range of industrial applications and ceramic electrostatic chuck to improve wear resistance, corrosion protection, thermal insulation of metallic surface. Calitech has been dedicated to establish the plasma spray line since 2008, and certified by international equipment manufacturers with Yttrium/Alumina oxides coating in 2013. We are actively working on “next generation” coatings and materials for plasma spary technologies.
In-house capability to design and fabricate tooling, assembly and test fixtures further enhance our ability to respond quickly to customer requirements. Precision testing services include functional and dimensional inspection, He leak check, failure analysis, automatic optical inspection, dynamic balancing design, etc.
